Figure 2

Figure 2. Quantum efficiency of a bare delta-doped CCD (triangles) compared with solid line (Si transmittance) shows 100% internal QE. An example of QE enhancement by the addition of anti-reflection coatings optimized for the 300-400 nm regions is also shown (crosses). For ease of interpretation, the data below 200 nm have been corrected by dividing the measured response by the quantum yield, which we have approximated with the ratio E(photon) / 3.65 eV, where E(photon) is the energy of the incident photons measured in electron volts. With this convention, the maximum quantum ef ficiency is 100% at all incident energies.