Документ взят из кэша поисковой машины. Адрес оригинального документа : http://www.issp.ac.ru/lsds/en/methods/dlts.html
Дата изменения: Unknown
Дата индексирования: Sun Apr 10 04:12:21 2016
Кодировка:

Поисковые слова: http www.astronomy.ru forum index.php topic 4644.0.html
Laboratory of spectroscopy of defect structures ISSP RAS
en ru

LSDS ISSP RAS
Time of flight SIMS
Time of Flight Secondary Ion Mass Spectrometr xyz-table control

Avaliable methods of research


Deep Level Transient Spectroscopy (DLTS)

Deep Level Transient Spectroscopy (DLTS) is a unique and powerful tool for the study of electrically active defects (known as traps) in semiconductors. DLTS can be used in one of two modes of operation; with Schottky diodes or with p-n junctions. With Schottky diodes, majority carrier traps are observed by the application of a reverse bias pulse, while minority carrier traps can be observed by the application of a forward bias pulse.

DLTS

The technique works by observing the capacitance transient associated with the change in depletion region width as the diode returns to equilibrium from an initial non-equilibrium state. The capacitance transient is measured as a function of temperature (usually in the range from liquid nitrogen temperature to room temperature 300K or above). By using a double box-car averaging technique peaks at a particular emission rate are found as a function of temperature. By looking for emissions at different rates and monitoring the temperature of the associated peak, an Arrhenius plot allows for the deduction of a trap's activation energy.

... top