The space cryogenic submillimeter telescope based on hot-electron microbolometers (Project Submillimetron)

Äîêóìåíò âçÿò èç êýøà ïîèñêîâîé ìàøèíû. Àäðåñ îðèãèíàëüíîãî äîêóìåíòà : http://www.stsci.edu/stsci/meetings/space_detectors/gromovkuzmin-e_figure_3.htm
Äàòà èçìåíåíèÿ: Wed Aug 29 23:50:09 2001
Äàòà èíäåêñèðîâàíèÿ: Sat Dec 22 21:19:03 2007
Êîäèðîâêà:
Ïîèñêîâûå ñëîâà: shadow

The space cryogenic submillimeter telescope based on hot-electron microbolometers (Project Submillimetron) - Figure 3

Figure 3

(a)
(b)
Figure 3. a) SEM picture of an NHEB power detector structure. The structure is fabricated by e-beam lithography and shadow metal evaporation from different angles. The absorber strip is made of normal metal (copper) and has dimensions 5x0.25x0.07 mm³. At right: Schematic diagram of the NHEB. b) Electrical NEP of the sensor as function of frequency measured at three substrate temperatures.