... DLTS . ... Deep Level Transient Spectroscopy ( DLTS ) is a unique and powerful tool for the study of electrically active defects (known as traps) in semiconductors. DLTS can be used in one of two modes of operation; with Schottky diodes or with p-n junctions. ... The capacitance transient is measured as a function of temperature (usually in the range from liquid nitrogen temperature to room temperature 300K or above). ...