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Дата изменения: Wed Oct 21 14:25:59 2009
Дата индексирования: Tue Oct 2 00:29:28 2012
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Nd:YAG
.. 1, .. 1, .. 1, .. 1, .. 1, .. 2, .. 2, .. 1
; 2 - .. .. E-mail: onov@mail.ru

1

Creation of laser-induced morphology features in a different ambient, particularly air and vacuum, by a 532 nm nanosecond Nd:YAG laser on crystalline silicon is reported. There are four types of features laser-induced periodic surface structures (LIPS), micro-pin, micro-pyramids and concentric frozen waves were found.

, , . , - , , , .. . , , , . Nd:YAG [13], [4,5], CO2 [6], Ti: [7]. . Nd:YAG 532 . (100) -4,5. - 2 . . , 10-6 , . Nd:YAG 10 , 10 . 60 . 0,5 4 /2.

. 3 . 10 10000. , . . : (LIPSS), , . . 1.

. 1. : a - 2 (LIPSS) 530 (0,5 / , , 3000 ), b - 2 2 (3 / , , 10000 ), c - (1 / , , 10000 2 ) d (0,7 / , , 3000 ).

(. 1) 530 20 3000 0,5 /2, . [8]. (. 1d)

3000 0,7 /2. , «» . (. 1c) . , . 10000 1 /2. , 3000 3 /2, . , 3 /2 , . 1b, .. 10000 . , Nd:YAG 532 nm. : (LIPSS), , . 0,5 /2, 4 /2. . (. 02.740.11.0055), ( 09-08-01053-) -133.2008.2.
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