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Moscow University Chemistry Bulletin Vol. 50, No. 6, P. 468 (2009)
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A. N. Shatokhin, F. N. Putilin, M. N. Roumiantseva, A. M. Gas, kov

Hydrogen gas-sensitivity thin films of tin oxide surfase doped platinum laser plasma with different structure and charge composition

Abstract

Influence of structure and charge composition of laser plasma Pt is investigated at the surface doping thin filmsSnO2 on their resistive sensitivity to hydrogen. The structure and charge composition of plasma changed as a function of magnitudes and polarities of a potential(UD) the inhomogeneous electrostatic field created between a target and plates of a diaphragm, located in vacuum chamber outside of a zone of a dispersion of plasma at radiation Kr–F-laser on a platinum target. Doping atUD> 0 calls increase sensitivity filmsSnO2 in some times greater, than doping by quasineutral plasma(UD=0). A films, doped atUD <0 with optimal on a maxima sensitivity surface concentration Pt appear tolerant to change of a gas-phase composition in a temperature range 50–600°C.
Moscow University Chemistry Bulletin.
2009, Vol. 50, No. 6, P. 468
   

Copyright (C) Chemistry Dept., Moscow State University, 2002
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