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( , , , , transmission electron microscopy - TEM) , () ( ) (scanning electron microscopy SEM). . . , 1931. . ( ) «» 1939. [1]. . «» 120 , 200 500 ­ , 1 3.5 . . , 1937 . « ». , . - «Rasterelektronenmikroskop". "Scanning Electron Microscope" SEM, . 50- . 60- . , , . , , . , . , , . , [2-5]. [6-9]. . . [10]. , , , . ­ , , , . , , , , . ,

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, , . . . , LEO912AB. , () « » . - . , , . . .

1. 2. 3. 4. 5. 6. 7. 8. 9. 10.

. Ruska E. (1980) The Early History of the Electron Microscope. Verlag GmbH & Co. ., ., ., ., ., (1968) . .: , 574 . ., . . (1983) . -.: , 318 . . (1966) . -.: , 472 . Reimer L., (1993) Transmission Electron Microscopy, Springer Verlag .., .. (2002) , ., - , 66. .., .. (2001) , 1, - , 108 . .. (1990) , ., , , 128. . . (2004) . . . - « », 244 . Williams D.B. and Carter C.D. (1996) Transmission Electron Microscopy. A Texbook for Materials Science. Plenum Press, New York, London, 729p.

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1. . . . . . . . . -. - . . . . 0.1- 1 µ ~ 1012 , . 100 1.6 108 /, .. 0.5, - 0.16 . 0.1 µ, , , . , = h/p, (1.1) h ­ , p ­ . = 1.22/1/2, (1.2) []=, []=. .1.1. . 1.1. . , , , , (109/) (10-12) 100 3.7 1.644 120 3.35 1.759 200 2.51 2.086 300 1.97 2.330 400 1.64 2.484 1000 0.87 2.823 0 , . 1.1 [1,2].

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.1.1. .

­ (elastically and inelastically scattered electrons) , (X-rays), (light), - (Auger electrons) .. . , [2]. t, N, , A, , , , Qt = NtT = N0t/A , (1.3) N0 ­ . T , , , d/d = (1/(2sin))d/d. (1.4) , , (mean free path) , = 1/Q = A/(N0) (1.5) (100) , (unscattered electrons), (single scattering), (120) (multiple scattering). . (elastically scattered electrons). ­ , . , , .. 0. . . , . , , 1800. 6


, (>900). , ­ . , , (). ( , ), - . : d()/d = e4Z2/[16E02sin4(/2)]. (1.6) 0 , : n = 1.62 10-24(Z/E0)2cot2(/2). (1.7) . , , . : a0 = 420/(m0e2) = 0.0529 , (1.8) 0 ­ , , sin2(/2) (1.6) [sin2(/2)+(0/2)2], (1.9) 1/2 1/3 0 = 0.117 Z /E0 , (E0 ). (1.10) : = 2/{2m0E0[1+E0/(2m0c2)]}1/2. (1.11) .1.1. d()/d= =4 Z2/{644(a0)2[sin2(/2)+(0/2)2]2}. (1.12) , 300-400 Z<30, . . .1.2 [3]. , ( Q) 0, 0=300 , 0=100 . .1.2. ( %). , . . , (30% Cu). . ,

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. , , . , , f(), |f()|2 = d()/d. (1.13) . . . (inelastically scattered electrons) <0 - (energy loss electrons) ) ; ) , ; ) (. .1.1). ,

. 1.3. .

. 1.4. .

, .1.3. EELS (electron energy-loss spectrometry), (.1.4 [1]). . 1.5 [3].

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( X-ray emission) , , - 0. , EELS, XEDS (X-rays energy dispersive spectrometry), . () , , - (.1.6).

. 1.5. Al , (~00): - ; K, L ­ - L, (FSE) (SE). ().

, , L3. () (characteristic K-L X-ray emission). L- . . . 1.7. [4]. . 1.6. . , . (~). , 0~ . ,

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U=E0/Ec>1. , [5] I = [e4bsns/ (E0Ec)]log(csE0/Ec), (1.14) ns ­ s-, bs, cs ­ . ( = v/c): I = {e4bsns/ [(m0v2/2)Ec]}log[csm0v2/(2Ec) ­log(1-2) -2], (1.15) 2 E0=m0v /2 ­ .

.1.7. - K-,L- -.

, U 5. , 0 >100 Ec < 20 U > 5 . , , . : -, , (<10), - ­ 4.

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- ph (1.16) = 1.24/ph , []=, [ph]=. - [6]: = B/(Z-C)2, . (1.17) , , - -. , , , Z. (Z) = Z4/(a + Z)4, = 106 -. (1.18) -3 (Z=6) 10 , Ge (Z=32), 0.5. : XEDS ! EELS! (Bremsstrahlung X-rays) , , , , (). , [7]: N(E) = KZ(E0 ­ E)/E, (1.19) N(E) ­ - , E0 ; K ­ , Z ­ . . 1.8. , , . .1.8. . -, . , .

(B, secondary electrons - SEs) : · - (<50 ) (slow SEs), . · (fast SEs - FSEs), . , , 50% . · (Auger electrons). , . , .

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. . 1.5 (SE) , , , . , .. . , . , . , , ( - STEM), , . , ! , , (FEG - field emission gun) (. 3), , 1 30 . 0=100 , FEG-. >~50 , ~ 5 . , 0. Z . , , . , , . (=FSE). . . 1.5 , , . , 0<30 , , , ~50-200 . (), , . , , . , , . , . , . - ( - Auger electrons), , . - .1.9. . -. - L1-, = -L L3 . K-L1,L3 . L () , ( ), . , . - , .. . . . , . (, AES-Auger electron spectroscopy) - 12


. , . , , . / . - , / .

. 1.9. -. . 1.10 . - , - (e-h) ­ , . - . (, CLcathodoluminescence). . 1.10. , . , p-n , (!) . ! «, » EBIC- ("electron beam induced current"). EBIC- , "charge collection microscopy" (CCM). 13


. , . . , , 10 . . 1.5, . , , , , , , . , ~100. , , , . [8] d0/d = [1/(2a0)][E/(2+E2)], (1.20) - ­ .. « », =/(20). ~15-25 , , (1.20) , >>10 , , . , .. . , . - , . . , . , <~0.1 , , , (5-15 ). , . , , Z3/2 . . Au ~350 Al, ~2-3 . , , . . : · ­ ( ), ; · (knock-on damage) - .

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, !

. 1.11. -1-1.

. 1.12. Ed Eth (.. ) . Ed= 15-25 .

(Gray - Gy), 1 1 . 1Gy = 100 . , , , . , . , , , . , , , , . 1.11 [9]. , , , , ~17000. - , , .. , , .. . , . , . , . , : · . · (). · . · . · . . , , ,

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( ). . , Et, , Ed, . [9]: (1.21) t = {[(100 + AEd)/5]1/2 ­10}/20 [Et] = , [Ed] = . Ed = 25 , , . 1.12 [9]. , 120 , 400 ­ , 1 ­ . ­ . - !

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