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. ..
- . ..

XIX
( 26 28 2009 .)

2009

539.1.01.08 22.37. 29 ... : .. , .. ., .. , .. , ..

29

XIX / . . .. . .: , 2009. 183 . , .

© . .. , 2009

I 26 , , 1030 1200 1

.. ..

. 1. 2. .. . (1965 -2009). (30 ) .. , .. , . , T. Ikeda, Y. Yamazaki. . (15 ) 19 20

1200 1230 26 , , 1230 1400 II

.. 1. 2.

3.

4.

.. , .. . . (15 ) .. , .. , .., .. , .., .. . . (15 ) . . , . . . . (15 ) .. , .. . . .. . . ( 25 .)
1400 1500

21

22

23 24 25

3

1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. 15. 16.

. . . . .. , .. , .. , .. . . .. , .. . . .. . . .. . . .. , .. . . .. , .. . . .. , .. . . .. , .. . . .. . , . .. , .. , .. , .. . . .. , .. , .. , .. . <100> . .. , .. . . .., .. , .. , .. . Zr-H. .. , .. , .. . Zr-V, Zr-He-V. .. , .. , .. . .

26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41

4

17. 18. 19. 20. 21. 22. 23.

.. . . .. , .. , .. . . .. , .. , . , .. , .. . . .. , .. . . .. . . .. , .. . , . .. , .. . . .. , .. , .. . . .. , .. . . .. , .. . . .. , .. . Ni-0.18.%. .. . . .. , .. . - . .. , .. , .. , .. . . .. . .

42 43 44 45 46 47

24.

48

25.

49

50 51 52 53 54 55 56

26. 27. 28. 29. 30. 31.

5

II 26 , , 1500 1630 I

..

1. 2.

.. , .. , .. . . (15 ) .. , .. , .. , .. .. , .. , .. , .. . . (15 ) .. , .. , .. , . . . DCR- <110> Si LiF. (15 ) .. , .. . . .. , .. . . (20 )
1630 1700

59

3.

60

4.

61 62 63

26 , , 1700 18

45

II

.. 1. . . , . . . : . .. , .. , .. . : . ( 20 ). .. , .. , .. . : . (15 ).
6

64

2.

65 66

3. 4.

.. , .. . «» . (15 ) .. , .. , .. . . .. , .. , .. . . ( 20 ) .. , .. , .. , . . , .. . . (15 ) .. , .. , .. , .. . - . (15)

67 68 69

5.

70

6.

71

1. 2.

3. 4. 5.

6.

7.

.. , .. , .. . . .. , .. , .. , .. . . .. , .. , .. . . .., .. , .. . . .. , .. , .. , .. .. , .. , .. . . .. , .. , .. , .. , .. . . .. , .. , .. , .. . .
7

72

73 74 75 76

77

78

8. 9. 10. 11. 12.

.. , .. . . .. , .. . . .. . , Cu Ag. .. , .. , . . . .. , .. , .. , .. . CaF2 .

79 80 81 82

83

III , 27 , , 1000 - 1130 I

..

1. .. , . , . . . Cu2. (15 ). 2. .. , .. , .. , .. ,.. , .. , .. , .. , .. , .. . . (15 ) 3. .. , .. , .. , .. . - - . (15 ) 4. .. , .., .., ... . (15 ) 5. ... , (111) l Au, Au1 Au400 . (15 )
8

87

88

89 90

91

1130 1215 27 , , 1215 1400 II ..

1.

2.

3. 4. 5.

6.

... . (15 ) . . , . . , . . , . . , .. , .. , .. . . .. , .. , .. , .. , .. , .. , .. , .. . . ( 15 ) .. , .. . , (111) Ni, . (15 ) . . . (15 ) .. , .. , .. , .. , .. , .. , .. , .. . . (15 ) . , . , ., . , . . , . (15 )

92

93

94 95 96

97 98

1400 1500

1. 2.

.. , .. , .. . .. , .. , .. , .., .. , .. , .. . .
9

99

100

3. 4.

5.

6. 7. 8.

9. 10.

11. 12. 13. 14.

15.

.. , .. , .. , .. . NixSi1x - . .. , .. , .. . , . .. , C.. , .. , .. , .. , .. , .. . . .. , .. . . .. . - . .. , .. . . .. , .. . . .. , .. . . .. , . .. , .. . CdTe . .. . - . .. , . , .. , .. , .. . SiO2/Si, Ba+. .. , .. , .. , .. , . . Ar+ MgO.

101

102

103 104 105

106 107

108 109 110 111

112 113

10

16.

17.

18. 19. 20.

.. , .. , . , . , .. . (). .. , .. , . . . .. , .. . . .. . . .. , .. , .. , .. , .. . GaN .

114

115 116 117

118

IV 27 , , 1500 1630 .. 1

1.

2.

3.

4.

5.

6.

.. , .. , .., ... 4-SiC , . (15 ) .. , .. , .. , .. , .. , . . , .. , .. . Fe3O4/MgO/Fe3Si. (15 ) .. , .. , .. , .. . . (15 ) .. , .. , .. , .. , .. . AlGaN/GaN . (15 ) .. , .. , .. , .. , .. , .. . (Zn,Co)O . (15 ) .., .. , .. , .. . .
11

121

122

123

124

125

126

.. , .. , .. , .. , .. , .. . Xe+ - Ti . ( , 20 )
1630 1715 - .

127

27 , , 1715 18 1.

45

II

..

2.

3.

.. , .. , .. , .. . . .. , .. , .. , .. .. , .. . - , . .. , .. , .. . . ( , 20 ) .. , .. , .. . .. , .. , .. , .. , ... . ( , 20 ) .. , .. , .. . - . .. , .. , .. . . ( , 20 ).

128

129

130 131

132

133 134

1.

.. , .. . , .

135

12

2.

3. 4. 5. 6. 7.

.. , .. , .. , .. , .. . Ge AgGaSe2 . .. , . . . .. , .. . . .. , .. . - . . ., .. . . .. , .. , .. , .. , .. , .. . - -. .. . , . .. , .. , .. , .. , .. , .. . . .. . .
00 30

136 137 138 139 140

8. 9.

141 142

10.

143 144

28 , , 10 11 I ..

1.

2.

3.

.. , .. , .. , .. . . .. , .. , .. , .., ... - . ( , 20 ) .. -, .. , .. , . , .. , . . Al-Cr. (15 ) .. , .. . - : . (15 )
13

145

146

147 148

4.

. . , . . , .. , .. , .. , .. . . .. , .. , .. , .. . . (20 )

149

150

1130 1215 . 28 , , 1215 1335 II

..

1. 2.

3.

4.

. , . . . (15 ) .. , .. , .. , .. . (Zn1-xGax)O1-y. (15 ) .. , .. , .. , .. . . (15 ) .. , .. , .. , ... . .. , .. , .. , .. . - . ( , 20 )

151

152

153 154

155

1. 2.

3.

.. , .. , .. , .. , .. , .. . . .. , .. , .. , .. , .. , .. , .. , .. . - . .. , .. , .. , .. , .. , .. . 110, 14

156

157

4.

5. 6.

7.

8.

9.

10.

11. 12. 13. 14.

. .. , .. , .. , .. , .. , .. , .. , .. . - 110, . .. , .. , .. . . N. Kuzminchuk, B. Fabian, H. Geissel, R. KnЖbel, C. Kozhuharov S. Litvinov Y. Litvinov, Z. Patyk, W. Plaъ, C. Scheidenberger, B. Sun, H. Weick. Development of a timeof-flight detector system for isochronous mass spectrometry at FAIR. . . , . . , . . , . . , . . . - . .. , .. , .. , .. , .. . . .. , .. , .. , .. , G. Abadias, .. , ., , .., .. . (Tix-Zr1-x)N . .. , .. , .. , .. . () . .. , .. . /, - Cr . .. , .. , .. . . .. , .. , .. , .. . VDP. .., .. , .. , .. . - () .

158

159 160

161

162

163

164

165 166 167 168 169

15

15.

16. 17.

.. , .. , .. , .. , .. . . .. , .. , .. . 1612 Ni++ 7 . .. , .. , .. , .. , ... 156, .

170 171

172 173

16

I.

(1965 -2009) . . 1) 1) , , ( ) . : · · · · · · · ..: /1-2/ /3/ ( ). 1. 2. 3. .. // , 1965, .2, 1009 (Sov. J. Nucl.Phys. 2, 719 (1965)) .. // , 1965, .2, 111 (JETP Lett. 2, 111 (1965)) .. // , 2007, .70, 7, 1213 (Physics of Atomic Nuclei, 2007, Vol. 70, No. 7, pp. 11741181)

19

.. 1) , . 1), .. 2), T. Ikeda3), Y. Yamazaki3) 1) , , 2) , , , , -, . , , , «». , , - , , , . .. , , - (), . , , . . r0. , , n*r02 1, , , . , , . , , , n* , .. . .

20

.. , .. , -- . <001> Al, [1], . - , . . , . 1. Schuller A., Winter H. //Nuclear Instruments and Methods in Physics Research 2007,B V. 256, P.122.

21

..1, ..2, ..1, .. 3, ..3, .. 3 1 . .. 2 . ., 3 () ..., [1,2] ( ) , , , . ( ). , , (P25-60 ) , . "" . , . "" , , P250-600 . , 1.2 . () 3.5 (. .). Pb 5 . J 6.104 /2 , Q 2.5.109 / 0.1 . . 1. 2. .., .., .., Hyun Ik Yang, Denis B. McConnell, .. //, 2007, 3, . 5560. .., .., .., .. //, 2009, 4, . 1-10.
22

. . , . . . . , . , ( ) /1/. - /1 /. . , . . , , . : 1) , , 2) . 1. .., .. . -.: , 1985/3, 63 .

23

3.

.. , .. . .. , . , , e-mail: shulga@kipt.kharkov.ua . . , . [1]. 1. Taratin A.M., Voribiev S.A. // Phys. Rev. Lett, 1987, A119, p.425

24

.. . .. , , , e-mail: shulga@kipt.kharkov.ua . , , , , . FERMILAB [1] . CERN 2008 [2] [3] . 1. 2. 3. Carrigan R.A., Jr. // Book of abstracts of 3rd International conference "Channeling 2008", 25 October 1 November 2008. Erice, Italy, p.83 Scandale W. et al. // Phys. Rev. Lett, 2008, v.101, 164801 .., .. // , 1991, .54, .520

25

. . , (« ») , /1/. « » , N2+ n+, 60+ /2/. . , . -. « » /3/. , /4/. N2+ O2+ , , /5/, - . 1. 2. 3. 4. 5. Gemmel D.S., // Chem.Rev., 1980.V.80. P.301. Hereda-Avalos S., Garcia-Molina R., // Phys.Rev. A, 2007. V.76. P.032902. Matsushita T. et al., // Phys.Rev. A, 2007. V.76. P.032903. .., // , .., .58. N3. .19. Blazevic A., Bohlen H.G., W. von Oertzen et al., // NIM B, 2006.V.245. P. 41.
26

.. 2), .. 1), .. 2), .. 1 1) , , 2) , . ., . - . ( ). . . , . ( 50 ) ( 30 ). . 30%. , 10%. . , , , .. . , ( 2%) . , . , 1019-3. , . .

27

.. , .. , , , [1,2]. ( ), (). . [3] . , , . . «», . ( ) , . .. , . , , .. . . 1. 2. 3. Assman W., Huber H., et al. // Phys. Rev. Lett. 83, No 9, 1759, 1999. Andersen J.U., et al. // NIM 193, p 118, 2002. .., .. // 3, . 74-77, 2008

28

.. , , - , , . . , Eo =20 X.

.1 X, 20 . : 1 GEANT4; 2 PENELOPE; 3 CASINO.

.1 , Etr 30-50%.

29

.. , , /1-2/ - /3/. - , . /4/. , - , /5/. ( ). . . , , , . 1. 2. 3. 4. 5. .., .., ..// , 2003. .34. . 823. ..// . - .: , 1994, . 240. Olsen H.A., Kunashenko Y. // Phys. Rev. 1997. V. A56. P. 527. ..// , 2007. .3. . 66. ..// , 2009. .4. . 1.
30

.. , .. , , , /1/ /2/ (, , Li, B, N) 0.01 0.6 /. (, ), (, ).
-dE/dx, /

14

2

N
12

CH
10 8

4

Li
6 4 2

H
0 ,1

0,01

, /

. 1. H (), Li () N () . ±15%.

, /2/ , . 1. 2. .., .., .., ..// .1962..42. 1..44. Paul H., Stopping power graphs, www.exphys.uni-linz.ac.at/stopping/
31

.. , .. , , . 10 He+ 10(E) = 10s(E) + 10t(E) , (1) E , 10s(E) - (1snl)1L (n1), 10t(E) - (1snl)3L (n2), n,l , L (L=l). .1 10t(E)/10(E) () n5, l2 .

.1 10t(E)/10(E) : 1 He+ + He; 2 He+ + N2; 3 He+ + Ne, g - He+ + He.

E 10t(E)/10(E) , /1/. E>1 / . 1. Winter T.G., Lin C.C.// Ph.Rev. A, 1975, V.12, P.434.

32

.. , .. , . -- [1]. - . , , . , . , - . , . . , . [2] . 1. 2. .., .. // , . 2008, 3. C.77. L'Hoir A., Adoui L, Barrue F., et al. //Nucl. Instr. and Meth. in Phys. Res. 2006, V.B245. P.1.

33

.. , .. , . -- , . [1]. , , , . , - . , , . , , ( ) . 1. ..// , 2008, 34, n.7, 29.

34

, .. - . .. , . -, , . , , , . , . - , = 450°: 1, c - . , , (Cz-Si), - - ( -). Cz-Si Ec - 0.17 . - = 350° /1/. , - - Cz-Si, , , , . , Cz-Si, , - . 1. .. . .- : , 2003, 269 c.

35

.. , .. , .. , .. , . , /1/ (110) . 100 Q 19 , 240 Q 25 -- . . . 1 , E=100 , E=240 . 1 0.8 : Q 0.6 , Q -- 0.4 . 0.2 , - 0 0 0.5 1 1.5 2 2.5 3 , E=100 , Q=15 E=100 , Q=9 E=100 , Q=3 E=240 , Q=31 E=240 , Q=25 , E=240 , Q=19 . 1. , . , E=100 ( Q ) , E=240 ( Q ) -- . 1.
,

GrЭner F., Assmann W., Bell F., Shubert M. et al., //, Phys. Rev., 2003, B 68, 174104.
36

<100> .. , .. , .. , .. , , .1 E=15 <100> .

200 150

T'

100 50 0 -0.5 -1 -1.5 -2 -2.5 -3 X -3.5 -4 -4.5 1.5

-1.5

-1

-0.5

0

0.5

Y

1

1. E=15 <100> .

: X , Y , X = x d , Y = y d , x , y , d , T , t , T = T d , T . XY . : X ( 0 ) =-1, 249 , Y ( 0 ) =-1, 249 , VX ( 0 ) = 0 , VY ( 0 ) = 0,1 . . , , , . . . .

37

1) 2)

.. 1,2) , .. 2) , . , , . ,

/1/ () (, , ) . . , . /1/ . /2/, /3/. /4/. , , . , /4/, (56 ) . /2-3/ , . /5/ . , , . 1. 2. 3. 4. 5. Schwinger J. // Phys. Rev. 1948. V.73, P.407. .., .., .., .. // 1980. .31, .413. .., .. // . . 1985. .3, . 103. .., .., .., .. // 1985. .42, .61. Babaev A.A., Korotchenko K.B., Kunashenko Yu.P., Pivovarov Yu.L., Tukhfatullin T.A. // Charged and Neutral Particles Channeling Phenomena (Channeling 2008): Books of Abstrects of 3rd International Conference Erice, Italy, October 25-November 1, 2008. Erice, Italy: INFN, 2008. . 150.

38

Zr-H ..1), .. 2), .. 1), .. 1) 1) , , , ,

2)

. - Zr Zr-H. , , , . , . Zr . Zr 10 . H Zr, , , . , . . Zr sH(s-p-d)Zr , . Zr 1.65 , . Zr , , . , . , .

39

Zr-V, Zr-He-V
1) 2)

.. 1) , .. 2) , .. 1) , . , , . ,

. , /1, 2/ ( FLEUR /3/), Zr ZrHe , , 6 .%. , , , , . , , . E , Zr, 1,7 2,9 . E , E 0,5В1,0 . , . 0,5В1,0 , . . 1. 2. Hohenberg P., Kohn W., // Phys. Rev. 1964. V. B136. P. 864 Wimmer E., Krakauer H., Weinert M., Freeman A.J., // Phys. Rev. 1981. V. B24. P. 864. http://www.flapw.de

40

1)

.. 1), .. 2), .. 1) , . , 2) , . ,

. , . /1,2/, . , , , . . . , , , . . . 1. 2. .., ..//, 2000. . 118, .3(9), c.579. .., ..// .2006. T.32, .1. c.27.

41

.. () , , , , - . , . . . , , . , , , divB 0 . , E , . . Eh , E = Eh + Ee . , Eh , Ee , Ee = -grad e . Eh H , , . , Eh - Ee - , , , , , , . , P = Ph + Pe . . e - h - , . .
42

..1), ..1), ..2) 1) , . , ; 2) () , . , , (., , /1/), , . , , , , . , , . , , "" (. /1/) . , , . . , , , , , , /1/. , , , , , , . . . , , , . 1. . (), . . . -.: , 2004.
43

.. 1), .. 2), .. 1), .. 3), .. 1) , . , 2) , . , 3) () , . , 4) , , , . , 10 , . , , , ~ 20 . , , , . . , , . : 1) ; 2) 100 ( 10В100 ); 3) ; 4) , , ( 10 ); 5) .
44

- .., .. , . , ., - () , . , 7-200 . , 2 В 4 , . - , , 0,1 . . , . . -. , . 0,02 . , , .. . . , . , . .

45

.. , , . , ., . : - /1-3/; - - /4/; - , ; - , /5-6/; - , . : - ; - ; - ; - . , . 27 « . 4. . 4.4. - ». 1. 2. 3. 4. 5. 6. .. // . 2004. 8. . 15. .. // . 2004. 8. . 19. .. // . 2004. 5. . 37. .. . .: , 1978. 271 . - . . .: , 1967. 832 . .., .. . ..: , 1980. 256 .

46

, .. , .. , . , , . , , , , . (). (1) , (4 = 17900 , R0=2 , a=5.4). . . , , , . . , . . N .

47

. . , .. . , . . , . , , . a

(r ) = c p + mc 2 + i a V (r ) ; (r , t ) = e (r ) e

- i ( t - p r )

, V ( x ) e y ,
2 1,3 2 2V ( x ) 1,3 a 2 - 1 V ( x ) 1,3 , -a - =E - 2 2 2,4 2,4 - 2,4 e x 2m x 2mec x , . V ( x ) = V0 / ch 2 ( x / a ) W

(110)
E, 10
8
-3

2 - 1 / a = 10;100 .
E, 10 6
-2

0

0

-8 -2 -1 0 1 2 3

x, A

-6 -1 0 1 2

x,A
3

1 , , .
48

.., .., ... . , , (-) (, , v = vez ) (, E ( x, z ) = E ( x, z + ) ). v , 0 . p ( x, t ) = ( n , 0 ) En ( x )ein t .
2 (, 0 ) = 0 /(02 - n + i n )

(0 n ) E ( x, z = vt ) =

n

En ( x ) e

in t

. p( x, t ) n = 2 nv / = arctg[2( n - 0 ) / ] . W ( x ) =- p( x, n , 0 ) En ( x ) =- ( n , 0 ) | En ( x ) |2 W0 ( n , 0 ) e -2 x / F ( x ) =-W / x F0 e -2 x / , F0 = ( 2 / )W0 ( n , 0 ), W0 ( n , 0 ) 0.5 eV n - 0 x . n < 0 , n < 0 n > 0 n< 0a n> 0b W ( x ) < 0, F0 < 0 (a). n > 0 a) b) c) W ( x) > 0 , F0 > 0 , (b). (c) .
49

.. , .. . , , /1/. {k 11} ( k ). , 111 { } LiH H - . , {311}.
LiF Li + - {k11} k 5 . LiF . , : - , . W ± () - n - 4 -1 2 -1 - - n ( = x a x , a x

(
n

)(

)

x , () ), , . 1. .., .., .. // XVI . .: - ,1986, . 57.
50

.. , .. . , /1/ . . , , .. . , ( ). , , . , , ( ). , , ( ). . 1. .., .. // XXXVIII // - .: .- . -, 2008, . 32.

51

Ni-0.18.% .. , .. - , Y(E,x)·C(x)·n(x)/(dE/dx), - , n(x) ()- , . , (,)-, , (dE/dx) , /1/. - 13(,)14N , 0,18 .% 13 (). , (=134 ), 1.747 . /2/ , - , . . <110>. "" ( ), <110> . , n() , . , 13(,)14N, . , <110> Ni + 0,18.%13 0,7 . 1. 2. Skakun N.A., Shershnev V.M. // Eur. Phys. J. A29. 2006. P.383 Skakun N.A. at al.// Nucl. Instr. Meth. B67. 1992. P.203

52

.. School of Mathematics, University of Minnesota, Minneapolis, MN 55455,USA , (b) ( ) b=bs . [1] . . , . , (b) ~ - |b - bs| -1/2 , R = Rc , Rc . , , . - , , , . , 2L, . . . , , . Rc, , , 2L , . 1. .. , 87, 410, 2008.

53

.
1)

.. 1), .. 2) , , 2) , ,

( ) . , , «» . : xn +1 = xn + yn +1 , yn +1 = yn + F ( xn , yn ) , F ( xn , yn ) = kxn ( xn - 1) + ( + xn ) yn , ( x , y ) , , , k - (. [1]). ( x0 , y0 ) R 2 () . , . , : P T ; - n E T . (.. [2]) . 1 n , . 2 - n T ( () () ).

. 1 1. 2.

. 2

.., .. --. //. 2008, .418, 6, . 754-758. .. . .1. - .: , 1969 .

54

- .. , ., , .. , .. , . , , /1/, /2/ /3/, . -, . : 2e2 d U ( x) = 2 , x - d2 4

(

)

- ; d - ; x . 1 1. d = 100 2.
d = 50 3. d = 20 .
1.

1. 2. 3.

Taratin A.M., Vorobiev S.A., Phys.Lett. A, 119, 425 (1987) .., .., .., ., , 84, 445 (2006). .., .., .., . 200823. , 2008.- 6

55

.. - , . -, /1/. , . /2/ . , - - . , . () , , - , () , () . , /1/, , . - . 1. 2. ., ., ., . . .: , 1968, 575 . .. // . . , 2007, .71, 10, .1471-1780.

56

II

1)

.. 1), .. 1), .. 2) , . , 2) , . ,

() , , . , , . . , , /1/. 1. Baryshevsky V.G., Feranchuk I.D., Ulyanenkov A.P. Parametric X-ray Radiation in Crystals: Theory, Experiment and Applications. Berlin: Springer-Verlag, 2006, 176 P.

59

.. 1), .. 1), .. 1), .. 1) .. 2), .. 2), .. 2), .. 2) 1) . .. , , . 2) , , . , . () , . 7 ( , ). , , . , . (111) 15 . Si(Li) p.i.n. 140 . 3 , . .

60

DCR - <110> Si LiF .. , .. , .. , . . , , ( ) /1/. /2/ DCR (Diffracted Channeling Radiation). DCR Si LiF /3, 4/. DCR /5/. DCR DCR <110> Si LiF. . : · DCR ( ) · DCR - DCR 1. 2. 3. 4. 5. Baryshevsky V.G. and Dubovskaya I.Ya. // J. Phys. 1983. C 16. P. 3663. Yabuki R., Nitta H., Ikeda T., Ohtsuki Y.H. // Phys. Rev. B. 2001. V.63. P.174112. .., .., .. // . 2007. . 85. . 11. . 684. .., .., .. // . , , 2008, 4, . 17. .., .., .., .. // . , , 2009, .
61

.. , .. , , . , . () , , . , , , . , , , . . , . , , .

62

.. , .. , , . , . 30 , () : (), , (), . , , . () . . , () . . , , . , . , , . , : (.. ) . , ( ) .
63

: . . , . . , . , , . (RHI) , , . , . RHI (390 /... Ar17+ /1,2/) /1,3,4/, . RHI Z=92 /... FAIR (, ) /5/. RHI - . RCE /6/. RCE - - . RCE (220) 11 /... U91+ Si. Komaki K., Azuma T., Ito T.et al.// Nucl. Instr. Methods B, 1998, 146, 19. Azuma T., Ito T., Takabayashi Y. et.al.//Physica Scripta, 2001, T92, 61. Babaev A. A., Pivovarov Yu.L. // Journal of Physics B, 2008, 41, 195001. . ., .. // . , , 2009, 3 ( ). 5. Pivovarov Yu. L., Geissel H., Scheidenberger C. // Nucl. Instrum. Methods B, 2007, 256, 109. 6. Pivovarov Yu. L. // Nucl. Instrum. Methods B, 1998, 145, 96. 1. 2. 3. 4.
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65

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. 1. 10 30 .

1. 2. Nasonov N.N. // NIM B. 1998. Vol. 145. P. 19. ..// . 2004. . 126. . 1101.
66

«» .. , .. . .. . .., , , ( , , ), . () () . , , . , , . "" . , , . , . . . , . , . "" , , . , , , , , . - .
67

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68

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69

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70

.
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.. 1) *, .. 2), .. 1), .. 2) , . , 2) , . ,

- , , . , . , . , , , , , , . . - , , . - , , . . , , .

*

naumenko@npi.tpu.ru
71

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.. 1), .. 1), .. 2) , , 2) , ,

/1/, () /2/ , . , , , . /3/ . /3/, ~ . , , /4/. : 10 -1; 70%; 100 ; 5 . , , . 1. 2. 3. 4. Lobko A. // Abstr. Intl. Conf. "Channeling 2008" (Italy), p. 27; Yamada H. // Nucl. Instr. Meth. B199 (2003) 509; .., .. // . , . 4.- .: , 1992, . 129; Beetz Ch. et al // US patent No 5997713, Dec. 7 1999

72

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73

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(1-10 ) . 500 1000 , , /1,2/. /3/, , - (), () . c , /3/. 1. 2. 3. Dolgih V.A., Kunashenko Yu.P., Pivovarov Yu.L. Nucl. Instrum. Meth. B 2003 V 2001(1), P.253 Efremov V.I., and Pivovarov Yu.L. Proceedings of International Conference on Charged and Neutral Particles Channeling phenomena II: "Channeling 2006", Proc.SPIE 6634 (2006) 66340T. Artru X., Fomin S.P., Shul'ga N.F. Nucl. Instrum. Meth. B 2005, P.476

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.. 1), .. 1), .. 1), .. 1) .. 2), .. 2), .. 2) 1) , . , . 2) , , . , . ( ) . . , . ( , ), , . , , () , , , - , ( ). , , , , . ( ). , , . , . 100 .
76

.. , .. , .. , .. , .. , . , /1-2/ (), . . . , /1-2/, 1 . 30 /3/. 300 . 1. 2. 3. .., .., .., .., .. // . . 2006, 4, .41-46. .., .., .., .. // . .: , , , 1996, 1(64), .54-57. Bochek G.L., Kulibaba V.I., Maslov N.I. et al. // Problems of Atomic Science and Technology. Ser.:NPI, Kharkov, NSC "KhIPT", 2, 2002, p.p. 52-54.

77

.. , .. , .. , .. , . , ~p, 500 /1,2/, - . , - , . ( ) /2/. /2/ /3/, . 1. 2. 3. .. . // , 2001, .64, . 5, .1. .. . // , 2004, .80, . 6, . 447. Backe H. et al. // Proc. SPIE, 2006, Vol. 6634, 66340Z (arXiv:physics/0609151 v1 18 Sep 2006).

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79

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1)

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. , . .

80

, Cu Ag. .. . .. , , (), Cu(100) Ag(100), , (). 400е, =7, =450 . {001}, <001> . , = 00, 450, 900, 1350, 1800 = 9,8 1,5-2 (.1). , 00, 900 1800. , <001> = 00,900, 1800 , [110] . = 45 0, 1350 {110} . , , , . . Ag(100). , , , , , .

81

1) 2)

.. 1,2), .. 1), . 2) , . , Advanced X-Ray Technology, Inc., Birmingham, MI 48009, USA

, . , (bremsstrahlung), . , , (LINAC) (1030 ) , . LINAC, , . , , , . 1/, , . 4 = 8 7°, , 4 . , ( 40 , 5 ) LINAC ( 2,5 ), , . , (002) , GEANT .

82

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1)

.. 1), .. 1), .. 2), .. 1) . .. , , , 2) - . .. , , ,

(), , . , . I2·1015 /2 ( 1.24 , 140 ) K- Ca , CaF2. . K- Ca . 5.9 (Fe55) 20 %. NaI E>2.5 . . ( ) 100 . , ( 3.7 ) CaF2 10-7. .

83

III ,

Cu2 .. 1), . 2), . . 3) -, . , 2) Inst. fur Allgemeine Physik, Technische Universitaet Wien, Wien, Austria 3) - -, -,
1)

, , , , , , , - . - . /1/, Cu2 Cu , , , . Cu , , . - /1/ , 13, 27, 39, 75 195 , Cu2 100, 200 400 . Xe /2/ Cu 50, 100 200 . . 1. 2. .., ., .. // . 2008. .34. N12, .21. Kornich G.V., Betz G., Zaporojtchenko V., Pugina K.V. // Surface Science. 2007. V.601. P.209.

87

.. 1), .. 1), .. 2), .. 1) , . -, 2) Royal Institute of Technology, Stockholm, Sweden Lawrence Livermore National Laboratory, Livermore, USA
3)

3)

, , , . (). , , , , . , , . , . , TRIM. , , , . 2.5 . . nc, ( ), , . . , . , Si PFn n = 2 - / , n = 4 . 08-08-00585 09-08-92657. Work at LLNL was performed under the auspices of the U.S. DOE by LLNL under Contract DE-AC52-07NA27344.

88

.. 1), .. 2), .. 2) , .. 1), .. 1) , .. 1), .. 3), .. 3), .. 3), .. 4) 1) , . , 2) - , . , 3) , . , 4) Evonik Technochemie GmbH, Dossenheim, Germany () [1] : AlK Ar+ 600 1,1·1018 /2. . [1]. . . C1s C KVV , . , AlK Ar+. , , sp2 . sp2. 1. Chebotaryov S.S., et al. Modification of X-ray excited photoelectron and C KVV Auger spectra during radiative carbonization of poly(vinylidene fluoride) // Physica E: Low dimensional systems and nanostructures. Elsevier science. 2007. V 36 (2). P. 184-189.

89

- - , .. , .. , .. , , - -1 ( = 0 80o) Ar+ 30 1018 1019 /2 180 400. (), (), - () (). (T) Ar+ N2+/1/. , ( = 0) (T) Ta, -1 (T) 150, ~ 300 . , -, , () , . , , . , , . , , -1, , , , , . 1. .., .., ..// . ., . . . 2008. 1. . 58.

90

, (111) Al Au, Au1 Au400 .. .- , -, (.. ). /1,2/ , ~10% " ". ( - , ). - AuN ( N=1, 400) (0,18-40) /. ( 6 ), Al(111) Au(111). , Al , c Au , . 1. 2. .. // . , , 2008, 3 . 27 ..// XXXVIII (, 27-29 2008 .). . .. . ., , 2008, 203 . .97

91

.. - " " . .. , . , ( ), . , . . J . J 1H 92U, [1] , . , , 13Al ( : 200 20 ; : 1 10 ), J J/Z J [2,3] , . 1. 2. 3. . . . - : , 1971, 494 . Brandt W. // Phys.Rev. 1957. V.104. P.691. Chu W.R., Powers D. // Phys.Lett.1972. V.40A. P.23-25.

92

.. 1), .. 2), .. 2), .. 1), ..1), .. 2), .. 2) 1) . . . , . , 2) , , 10 20 , - 10 10 . (20 %) (10 %). 650 950°, - 3 10 . . () 78 , -21, Axiostar plus Zeiss, -4, -3. , , , . 5 - 9 . . = 650 ° . 12 . % e 5 7 78 . % 750 850 °. 650 ° , . = 727 . , . , 50 . 5 9 11 . % . -Fex(NC) = 650° 750 °. 650 850 ° 2 .% 20 . . . . -485.2008.2 .
93

.. 1), .. 1), .. 1), .. 2), .. 2), .. 1), .. 1), .. 2), 1) , , 2) , . , , , . , . . . , () BxNyz BxNy . , ( ). . . () . B, C, N O. 7.7 . 10 . , . 160є . , . , .

94

, (111) Ni, .. , .. . .. , , . /1/. - . , coso o (. /2/), (111) Ni <001> <011>: Fo(coso,o,Eo) = exp[ (coso cos )2/(212)] exp[ (o )2/(222)]/Eo2. ~55° ~35° . (111) Ni <001> , <011> (001) Ni /2/. ( ) ( , ). (111) Ni , , (001) Ni, . /1/ (111) Ni. 58,6% 99,7%. 1. 2. .., .., .. // . . ., 2000, . 64, 4, . 821. .., .. // 18- . " ". - .: - , 2007, . 1, . 205.
95

. .. , . , [1-2]. , . , - . 1. 2. Rasulev U.Kh. and Zandberg E.Ya. Surface ionization of organic compounds and it's application // Progress in Surface Science. 1988. v. 28, 3/4. - . 181-412. Rakhmanov G.T., Rasulev U.Kh., Saidumarov I.M. Application of surface ionization to determine rate constant and activation energy of dissociation reactions of nitrogen base polyatomic molecules on W oxides, //Surface and Interface Analisis. - 2006. - Vol. 38, - P. 219-223 .

96

.. 1), .. 1), .. 2), .. 1), .. 3), .. 1), .. 1), .. 1) 1) , . -, 2) - . .. , . -, 3) , , . -, (DLC) , , , , , , , . , , . , , . , . DLC P+ In+ 120 350 . Si PECVD . 0,2 , , 2 . TRIM, 0.17 . . , , . . AFM . , . 08-08-00948.
97

, ., . , ., . , . , , . , «» . (10-12 ), , , . «» «» , . . . ( ) ( ) . . ~E-b ( b=2) . , b, , , «» . .

98

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.. 1), .. 2), .. 2) - « » . .. , . , 2) . .. , . ,

/1, 2/ , . , /3/, , . , . , /2/. . . , . ( 09-02-99027). 1. 2. 3. .., .., .. // . . . ., 1991, . 55, 8, . 1. .., .. // . , 1996, . 62, 4, .20. Kanaya K.,Okayama S. // J. Phys. D. 1972 V. 5. 1. P. 43 58.

99

- - .. 1), .. 1), .. 1), ..2), .. 1), ..3), ..1) 1) , , 2) «», , 3) . .. , . , Y - - Ar+ 30 1018 1019 /2 180 400. , , . (), () , (). , () - , .. /1/. , , () , . , - , 1.5 Y -1 2 Y, . < 41019/2 , (Y|| < Y). ~ /2 Y|| Y, Y|| > Y. Y, , . - . , , , ~30°. ~50°. 1. Borisov A.M., Mashkova E.S. // Nucl. Instrum. Methods in Phys. Res. 2007. V. B 258, P.109.

100

NixSi1x - .. 1), .. 1), .. 2), .. 2) 1) . .. , . , 2) - (), , NixSi1x, NaCl (001), « » in situ -102. 1-2 = 20 600є. , Ni/Si/NaCl(001), Si Ni , Si, Ni -Ni2Si. , = 240є. = 240 340єC Ni Ni2Si. = 370єC NiSi. = 400 600єC . Ni1-0,5Six0,5, , . , : -Ni2Si a-Si. ~ 240 250єC NiSi. = 600єC . , , , Ni3Si. , ~ 240є . Ni31Si12. = 600є. , NiSi 240є. Ni Si 100є.

101

,
1)

.. , .. , .. , . ,

, , , . , , , /1/ (PXR) /2/, - /3/. . - (DCR) /4/ , , /5/. - " " ("channeling secondary electron emission", CSEE). -, CSEE , . /5/ , . CSEE, . , Mathematica 6.01, DCR /6/. CSEE . 1. 2. 3. 4. 5. 6. Kumakhov M.A. // Phys. Lett. 57A.1976. P. 17. Baryshevsky V.G., Dubovskaya I.Ya. // J. Phys. 1983. C 16. P. 3663. Klimbal J.C., Cue N., Roth L.M., Marsh B.B. // Phys. Rev. Lett. 1983. V. 50. P. 950. Yabuki R., Nitta H., Ikeda T., Ohtsuki Y.H. // Phys. Rev. B. 2001. V. 63. P.174112. Nitta H., Ohtsuki Y.H. // Phys. Rev. B. 1989. V. 39. P. 2051 Bogdanov O.V., Korotchenko K.B., Pivovarov Yu.L., Tukhfatullin T.A. // Nucl. Instr. and Meth. in Phys. Res. B, 2008. V 266, P. 3858
102

.. 1, C.. 1, .. 1, .. 2, .. 3, .. 3, .. 3 1) , . , 2) Evonik Technochemie GmbH, Dossenheim, Germany 3) , . , Fe Cu () Ar+ . Ar+ , . 3 : 1 + 2 + 2 . : Fe Cu. . F1s Fe/C 6%, . , , . F1s , , . , AlK- 7% 2.7% Fe2p Fe3p . , .

103

.., .. , . , ( 100 ) , . , , . [1,2]. , . 0 [3].

0 =-(5.5 В 7) 10-2 v

2

(

, v -

) O Si , [2] SiO2 / Si . k = 10 c O Si, .., . k , , .. O Si. , O Si , , 2 , . , (<100 ) . 1. 2. 3. .., .. // . 2008. .42. 11. .1400. Akiyama T., Kageshima H. et al. Jap. J. Appl. Phys. 2008. V.47. No.9. P.7089. ., ., , . .: 1972, .72.
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104

- .. , , SiC . , , . , , . , , - /1-2/, - . . . /3/ 4-6 , 2-4 . /4/. /5-6/. . 1. 2. 3. 4. 5. 6. Aumayr F., Winter H.P. // Phil. Trans. R. Soc. Lond. 2004. A362. P. 77. Ghose D., Karmaker P., Parilis E. // Nucl. Instr. Meth. 2003. B212. P. 420. Green T.A., Jennison D.R. // Phys. Rev. 1989. B.39. P.5407. Wang L.L., Perera A., Cheng H.P. // Phys. Rev. 2003. B.68. P.115409. Van Dorp D.H., Kelly J.J. // J. Electroanalyt. Chemistry. 2007. 599. P.260. Zhang L.Q., Yang Y.T., et al // Chin. Phys. Let. 2008. V.25. 7. P.2670.

105

.. , .. , . , , , , , . . Ar 1, . . . ( 250, ) , . 45. 100 . 0,1 /2 1012-1014 2. , - , . . , .

106

.. , .. ,. , 10-15 , , , , , . - - () Au3 Au5 Bi3, 60 /1/. - Cs+( Na+) 12H9NS+. 1201. - 1201. /1/. Cs ( Na) . . Cs+ (Na+) 12H9NS+ 5 45. . 10-10. ~0,1/2 . , 12H9NS+ , . 1. Rasulev U.Kh, Morozov S.N., Khasanov U., Usmanov D.T. //Nuclear Instruments Methods in Phisics Research B 258 (2007) 234-237.

107

- .. , .. . .. , . , , . , , . . V . /3/. , «Iskovich» (.1.).

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108

, . , , , , , . , - - . , . , /1/, , . 50% 30%, , /2/. , 8%, . . : 1. Cs+. , . 2. , 0,5В3 , Ag . 3. , 0,5 Ip 1µ/2, . 1. .., .// . 1977. .47. .6. . 1234. 2. Abdullaeva M.K., Atabaev B.G., Djabbarganov R.// Nucl. Instr. Meth. 1991. B62. P. 43.
109

CdTe . .. , .. . ., , , CdTe + dTe + CdS . , dTe , . , CdTe. Mo+CdTe+CdS , CdTe. CdTe , . , - , - P, S, Cl, K, C, O, Mn, Fe, Co Ni. , 10-4 %. Cd Te CdTe . , CdTe 63 % Te 38 % Cd. CdTe, , , , , . , CdTe 1200 . , CdTe - CdTe, . , CdTe , , CdS . CdTe .

110

- .. . .. , . , V+, Nb+, Ta+, In+, In2+, In3+ [1,2] Aum- 10 . - . - - . Bim- . 1 20 . - , ( ) "clearing the way" "sweepingout-electrons" [3]. , , - , . . , . . 1. 2. 3. Morozov S.N., Rasulev U. Kh.//Appl. Surf. Sci., 2004, V.231232, P.78. Morozov S.N., Rasulev U. Kh.// Izv. Akad. Nauk. Ser. Fiz., 2006, V.70, P.1192 (in Russian). Borisov A.M., Mashkova E.S., Parilis E.S.//Vacuum, 2002, V.66, P.145.
111

SiO2/Si, Ba+ .. , . , .. , .. , .. , /1/ , SiO2/Si SiO2 Si . + 0 = 1 D = 6·1016 -2 SiO2 50 55 .%, Si 40 45 .%. ( 30 .%) BaSi BaSi2. (W=1,8 -2 + =1000 ) BaSi2 d = 50 60 е. BaSi2/SiO2/Si. , , . . 1 BaSi2/SiO2/Si (111). BaSi2 0,5 Eg = 7,8 1,1 SiO2 Si(111)

50-60

30-

140-160

50-60

. 1. BaSi2/SiO2/Si.

d = 250 е. , BaSi2 SiO2, SiO2 Si 30 40 50 60 е . 1. Tashmukhamedova D.A., Umirzakov B.E., Tashatov A.K., //, Uzbek journal of physics. 2000, V.2, 1, . 38 42.
112

Ar+ MgO .. , .. , .. , .. , . , , MgO Ar+. . 1. MgO Ar+ 0= 1 . =100 . Mg s v

N(E), . .

. 1. MgO, Ar+ c E0 = 1 D, -2: 1 0; 2 1015; 3 61015; 4 41016.

4 3 2

1

E,

v 16

s 8 0

Ar+ , MgO Mg . D = 1015 -2, v s (10,5 17 ), , Mg ( s = 3,8 , v = 6,2 ). Mg. D=(24)1016 -2. Mg ( 10 е) 96 98 .%. D . .
113

() .., .., ., ., .. , , (Si, GaAs, CaF2). , , ( ), , , , . Si, GaAs CaF2 Ar+, Sr+, Na+, Ba+ Co+ . , CaF2 , : 1. Ba+, Na+ Sr+ (0 = 0,5 5 ) CaF2 . . , , . 2. + 0 = 0,5 D= 1014 -2 CaF2 5 10 , D = 1015 -2 100 200 , D 1016 -2 . ( 5560 .%) (25 30 .%), ( 15 20 .%). 3. = 1000 Ca0,6Ba0,4F2. 8,0 .

114

- .. 1), .. 1), . 2) , . , 2) Inst. fr Allgemeine Physik, Technische UniversitДt Wien, Wien, Austria
1)

-. . 13, 27 39 . . . , . , . : AIREBO /1/ , /2/ , - - - . - - /3/. . . . Stuart S.J., Tutein A.B. and Harrisson J.A. // Journal of Chemical Physics. 2000. V. 112. P. 6472. 2. Betz G., Husinsky W. // Nucl. Instr. and Meth. in Phys. Res. B. 1995. V. 102. P. 281. 3. Ellis D.E., Mundim K.C., Fuks D. et al. // Materials Science in Semiconductor Processing. 2000. V. 3. P. 123. 1.

115

.. , .. , . , - , ~ 10-100 , . , . . . , , , , . - :
k C SF I = k kk C t N0

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l SF

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l S

]

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k SF

k + DS

k 2C SF x 2

2k k C S k k C SF = DS - Ak C S - C t x 2

k = 1, 2 l = 2, 1 , , CkSF , CkS k , ; , Y , , CkSF; N0 ; I , ; Ds ; A , - . , .
116

. . , , , , . , , . , , , /1,2/. , . /3/. , , . , . . , , . SRIM. 1. 2. 3. . . .: - «», 1995. 321 . . . .: - , 2005. 102 . Tolmachev A. I. Nuclear Instruments and Methods in Physics 1994, v. B 93, p. 415. . Research,

117

GaN .. 1), .. 2), .. 2), .. 3), .. 4) 1) Royal Institute of Technology, Stockholm, Sweden 2) , -, 3) Lawrence Livermore National Laboratory, Livermore, USA 4) , -, , . , . , , , PFn GaN /1/. GaN, P+, PFn+ (n = 2, 4) E = 1.3 /... . , - , . , GaN , , . . , , , , . 08-08-00585 09-08-92657. Work at LLNL was performed under the auspices of the U.S. DOE by LLNL under Contract DE-AC52-07NA27344. 1. Kucheyev S.O., Azarov A.Yu., Titov A.I., Karaseov P.A., and Kuchumova T. M. // J. Phys. D.

118

IV

4-SiC ,
1)

.. 1), .. 2), .. , .. - 2) - ...

, () , () . , .. , , , , . , , , , . , , , . 70- , 90- (chemical vapor deposition - CVD /1/). , 4 , , , SiC-. 4H-SiC (CVD). , . ( - ) - /2/. , 70- SiC /3/ . 1. 2. 3. .. // , 1999, .33, .2, .129. .. // , , ., 2007, .26. .., .., .. // , , , 1978, .110.

121

Fe3O4/MgO/Fe3Si .. 1),4), .. 1), .. 1), .. 2), .. 2), . . 3), .. 3), .. 4) 1) (), , 2) . , , 3) , , 4) . , . , (), () , () , (MRAM) [1]. Fe3O4 , .. , [2]. // Fe3Si Tc~800 K, Hc~10-50 , Fe3O4 , Hc~350 , MgO . Fe3Si Fe3O4 MgO(100) Si , . (~2) MgO Mg (Po~ 10-7 ). in situ Fe3Si Fe3O4, MgO. ex-situ , inplane . Fe3O4 Fe3Si, . 3- ( ) . 1. 2. Zutic I., Rev. Mod. Phys., 76 (2004) 323. .., .., ., 164 (1994) 7

122

.., .. , ., .. - .. , .. , , (100), <110> <-110> . (111) . , . , . AJA ATC ORION. DC , 3*10-3. , . 150 750. (/). () (SEM LEO), Zeiss 1m (). .

123

AlGaN/GaN .. 2), .. 1), .. 1), .. 2), .. 2) 1) , , 2) «», , GaN . , . , AlGaN/GaN, (MOCVD), - (). , . (RBS) 2 . . , MOCVD , , ( = 1,1 %). ( = 7,5%) . , . RBS , . .
124

(Zn,Co)O .. 1), .. 1), .. 1), .. 1), .. 2), .. 2) 1) , , 2) , , , ZnO, Co, () , . (Zn,Co)O, , , , , . (Zn,Co)O, CVD R-Al2O3 (111) ZrO2(Y2O3). , , CVD , , CVD . (111) ZrO2(Y2O3) , «» «» , . /1/ , (Zn,o)O , , - Co2+. . , , CVD , , , , . CVD (Zn,Co)O . 1. Park C.H., Chadi D.J. // Phys. Rev. Lett. 2005. V. 94. P. 127204.

125

- ..1), .. 2), .. 3), .. 1) 1) , . , 2) , . , - , . ,

3)

, - Ti, Co, Zr Mo. 10-2 . 21016 -2, 3 0,26 /2. Si 50-100 . c «Fisher H100», - NT 206. 0.4 20 . 50300 . 5 . . . . , , 3-10 . . , Me/Si . , , ~0.2 ~1.1 . .
150

,

125

100

Mo/Si Zr/Si Co/Si Ti/Si Si

75

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0

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100

150

200

250

300

350

126

Xe+ - Ti .. 1), .. 1), .. 1), .. 1), .. 2), .. 2), 1) , , 2) , , . , . Ti ( 10-2 ). (100) Si. 0.2-0.4, 0.3-0.4 /. , Xe+. / He+ 2.0 1=0o, 2=12o, 3=168o , /1/. , Xe+, 9в1014 -2. Ti . , Ti+ , Xe+ = 10 , = 20 40 . -, , , . 1. BЖgh E. // Canad. J. of Phys. 1968. V. 46. P. 653-659

127

.. 1), .. 1), .. 1), .. 1) 1) , . , , . 3 , 2 [1]. : ( - -) ( --). [1]. , . , . - , - -Fe. . , - Fe2Ti, (Ti, Zr)N. ( ) . 1,5 - 3 . 1. . , .. , .. , .. , .. , .. . -- // XVIII « », , 7 12 2008, .615- 620.
128

- , .. 1), .. 1), .. 1), .. 1) .. 2), .. 2) 1) , . , 2) .. , . , /1-2/ () . , ( 100 ). - , . ( 1 2 ) - (400 ). 15 35 /2 . , - . Ti2N, 2 . , . 10 , - . , , -. , -. , - -. 1. .., .. . // , 2007, 1, . 40. 2. Uglov V.V., Anishchik V.M. et al.// Surf. Coat. Technol. 2005, V. 200, P. 297.
129

.. 1), .. 1), .. 2) , . , 2) , . ,
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(, , ) 10В25 , , . , - , 4В5 /1/. , , . , FEMLAB. , . 15В18 , /1/. , , . (2·105 /), . 1. V.V. Uglov, V.M. Anishchik and others// High Temperature Material Processes. 2004. V.8. Issue 4. P. 605.

130

.. , .. , .. , . , , . , ( - ). , , , . , () . , SiO2 , -50 - . (a-C:H, , ) 3 PECVD . (C2H2) (H2). 800° . «» - (30%+ 70% +) 300 , 60 . . ( 10 150 /2) ( 1 10). , (Neophot-2), - ( Solver PRO). , , , - . , , , , , ( ), .

131

.. , .. , .. , .. , .. , . , , . , , . , - . , ( ), (~200-1000 ) (~ 10-100 ). . . , . , () 1, AK6; 3 . - "". , PECVD . (C2H2) (H2). () -3. . . . , .

132

- .. , .. , .. - ( ), , , , . , , , , - - () , - () /1/. Al, Fe, Mo, Y «-» He+ + Ar+ (He : CAr = 1 : 10) ( 10 ). - ( ) Xm 100 . , 100 , /2/: · 20-50 %; · ; · , , , , Zr3Al, ZrFe2, Zr(FeNb), ZrMo2. 1. 2. .. // -2000.-.303.-.2.-.46-58. Kalin B.A., Volkov N.V. // Proceedings of 12th International Conference on Physics and Chemistry of Inorganic materials.-Tomsk.-2003-P.231-235.

133

.. , .. , .. - ( ), , , - /1/. () /1,2/. , . , He+, Ar+ 6 - 9 . , , . Al, Ti, Cu, Mo. , , . /3/. 1. Hino T., Nobuta Y., Yamauchi Y. et al.//J.Nucl.Mater.-2003.-V.313-316.P.167-171. 2. Aspens D.E.//In book: Handbook of Optical Constants of Solids, Edited by E.D. Palik.-Orlando etc.: Academic Press,1985.-P.89-112. 3. Belyaeva A.I., Galuza A.A.//Physica B.-2001.-V.304.-P.333-338.

134

, .. , .. . .. , . , . . . Si(111)7в7. Ag-3в3 Ag Si(111)7в7, 500°. , ( 30 ) . . - BESSY (. ) 100 135 . , (Fe/Si Fe/Ag/Si) . CsCl, . 8-10 Fe . FeSi CsCl , -FeSi2. . , Fe-Si , , -, . ( 07-02-01009-) - BESSY.
135

Ge AgGaSe2 .. 1), .. 2), .. 3), .. 4), .. 2) 1) . , , 2) , , 3) .. , , 4) , , () - () Ge (111) AgGaSe2, SiO2 (). , , 50 . - 2,0 . . (Nt), , . , , ( ) . . Nt, (1015) /2 , Ra, Ge Ge Ge Ge Ge AgGaSe2 AgGaSe2 AgGaSe2 AgGaSe2 AgGaSe2 AgGaSe2 , 140 , 75 , 30 , 3-5 SiO2 ACM 0,5/0 , 140 , 75 , 30 , 3-5 SiO2 10,06 10,51 8,20 7,97 7,95 66,02 52,78 23,54 16,26 12,26 1,731 3,154 1,174 1,094 4,636 2,793 1,288 1,211 0,938 0,848 3,143 3,816 1,628 - 1,8 4,837 3,805 1,567 2,014 1,288 1,127 1,412 2,245 0,926 0,853 2,764 1,613 2,200 1,587 0,723 0,646 -2,478 - 2,402 - 1,288 - 1,246 2,841 2,059 2,704 2,962 2,383 - 0,718

136

.. 1), Yu. Kudriavtsev2) - , --, 2) Dep. Ingenieria Electrica, Cinvestav-IPN, Mexico, D.F. Mexico
1)

, Ge-, -n-. - . , - . . - . , =20-40 . . (300-700) (70 , 50 /2) (p-Ge, 50 , 1·10-1-1·104 /2). SIMS- ("Cm" IMS-6f) 300 30 : ~1,5·Rp ~Rp (7,2·1019 -3) 3,3 Na . . .600 . .=700 . SIMS- 350 . n- , ( 30 ). n-- (.=350, t.=30 45 ), , ~0,8 . 1·103 /2 .350, >5·103 /2 .=200. .=550, , . , . .

137

.. ,.. , ., , . () /1, 2/. , - . Al2O3 /2, 3/. Crn+ (70 %) Fen+ (30 %) (100 , =1015-1017 -2) (=1-105 , =300-1800 ). , . Fen+ Crn+ 4.0 . . =1.5-4.0 CrAln+...CrAln+ FeAln+. 2.3-4.3 3.3-4.6 FeAl3+, CrAl3+ VO 4.2 . CrAl2+,4+-, CrAl3+ (~1.9 4.8 ) CrAl2+...4+ (~2.7 ) . F+- (~5.4 ) Ali0(+)- (~4.1 ). : =3001200, 1000-1500 1600-1800 . . 300-1200 , Al2O3, Crn+ /1/. =1000-1500 1.5-5.4 , CrAln+...CrAln+ (=1.5-3.8 ) FeAl3+...FeAl3+ (=2.5-3.6 /3/). FeAln+...CrAln+ 1300-1600 1600 . 1. 2. 3. Kozakiewicz A.G. //Nucl.Instrum.Meth.Phys.Res., 2002, VB191, P.582. Ando M., Kanemitsu Y., e.a. //Appl.Phys.Lett, 2001, V.79, No 4, P. 539. .., . // , 2001, .68, 3, . 376.

138

- .. , .. . .. , , - Nb2O5. ( = 15 ) ( = 10151018 -2) in situ (p = 10-8 ) Leybold LHS-10. Nb 3d , Nb2O5. , . Nb2O5 NbO NbO2, NbO. Nb2O5 , , Nb2O5 NbO2. Nb2O5. - . , Nb2O5 () , Nb2O5. Nb2O5 () - , , , .

139

.., .. , , (D+) , , . D(d,p)T . ( ) . in situ. 700 - , . , , . /1/. /2-4/. , /4/. - , , - /3/. - - . ( 07-0200020). 1. 2. 3. 4. Arbuzov V.L., Raspopova G.A., et al. // J. Nucl. Mater. 2000. V. 283-287. P. 849. .., .. . // , 2004, .97, 6, .66. . . . // , 2007, .103, 2, . 180. G. A. Raspopova, V. L. Arbuzov // The Physics of Metals and Metallography. 2009. V.107. No 1. P.58.
140

- - .. 1), .. 1), .. 1), .. 2), .. 2), .. 1) 1) . .. , . , 2) « », , Si MEMS/NEMS /1/ ( ) . , Si. , - 10 4 , . , , H /2/, , . , - W- H /2/ . . Si , - 2 . ( ) - , H . ( 09-02-97541) " " 2.1.1/2643. 1. 2. Bhushan Ed. B., Springer Handbook of Nanotechnology, New York, Springer-Verlag Berlin Heidelberg, 2004, 1222 .., .., .. // , 2006, 48, 2, 262

141

0, .. , . , () () /1-3/. , - , , , . , , , , . , pin . . . 1. 2. 3. .., .., .., .., .. . // . . 2005, 4, .68-71. Kulibaba V.I., Maslov N.I. et al. // Problems of Atomic Science and Technology. Ser.:NPI, Kharkov, NSC "KhIPT", 2, 2003, p. 85-88. The ALICE Collaboration, Aamodt K. et al., The ALICE Experiment at the CERN LHC, 2008_JINST_3_S08002.

142

.. 1), .. 1), .. 1), .. 1), .. 2), .. 2) 1) , , 2) , , () () 5 . . . . () , . . - () (C5H12Si)n , . 10-40 . 1,4 1021 -1 () «EVO 40» (Zeiss). 11,5 26,7 .% 32,4 28,8 .%. (0,5 .%) (12,6 .%), . . 100% Cu 3,6 10-6 Cu / . , . , . . , . . 07-08-13656-.

143

.. . .. , . , , . /1-2/. 1 1 104 /2, .. /3/. , . , /3-4/. , , . /5-6/, /6-7/, . . , . . 1. .., .. . .: , 1990, 334 . 2. Shi J.J., Kong M.G. // J. Appl. Phys. 2003. V.94. P.5504. 3. .. . - .: , 1987, 592 . 4. .., .. // . 1999. .69. 11. C.49. 5. Staack D., Farouk B., Gustol A., Fridman A. // Plasma Sources Sci. Technol. 2008. V.17. 025013. 6. Arkhipenko V.I., Kirillov A.A., Safronau Y.A., Simonchik L.V., Zgirouski S.M. // Plasma Sources Sci. Technol. 2008. V.17. 045017. 7. Belostotskiy S.G. , Donelly V.M., Economou D.J. // Plasma Sources Sci. Technol. 2008. V.17. 045018.
144

.. , .., .. , .. , . , , . , - ( , , -). Leco RHEN602. 1 H2SO4 0,05 /2. , ComTen 95T. . , , . , . , -, . , .

145

.. , .. , .. , .., .. , . , . (1212M1, 121810 ), , , , , . - . . . ( ) 5,0в2,0в36 3 5,0в2,0в25 3. 750° 1 . 1 LiOH ( H2SO4) ( ) 1 /2 3 72 . , 40 (~400 0C) . . 40 (~900 0 C), . ( ) . , ( 200 2 , 50 5 /2). .

146

Al-Cr .. -1), .. 2), .. 3), . 4), .. 5), . 4) 1) , , , 2) , , , 3) . . , 4) , , , 5) , , () , . Al-Cr . . , , , , .. , Al-Cr , , . () , 3.0 . % Cr. , ~106 /, 30-60 5-10 . . . (). , . , : . . , , Al-Cr .

147

- : .. , .. , , -- () , , , , . , . , . . , SiO2, . . N+ 40 (1-6)x1015 c2 SiO2 320 . + 130 5x1016 c2 Si SiO2 200 102 . 1000 . Si/SiO2 - (-V) (G-V) 102-106 . - 104 107 (Si). -V- , -, 6x1015 c2, , SiO2/Si. - 5 , SiO2/Si. SiON .

148

. . 1), . . 1), .. 1), .. 2), .. 2), . . 2) 1) . .. , . , , 2) , . , , , , 0.1 , 1.4 , 15 38 . - «-2» : 60 , 300 , 50 , - 51017 /2. 150. -

. , 60, 120 180 . , ( .. ) . (38 ) , . «», .

149

/ .. , .. , .. , .. . .. , . , , . , . . , , . ( ) . , , , , . . . . .

150

. , . , . , . . . - LaMnO3+ . ( 12 ), , . , 80 % 18. 2 , 18 (p, )15N 16(d, p)17O* 762 900 , . - . . , (, ) . , , 16 18. . , 10-20 2/. , ( 0,01%) . . ( 1012 ) . 09-03-00335.

151

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ZnO , - , . , ZnO. , ZnO(Ga), , , , . , , , , ZnO(Ga)/, . 16 , ZnO(Ga) . - 16, /1/, SiO2 MgO. , . ZnO(Ga), 5 .%. 1. Luomajarvi M., Rauhala E., Hautala M.// Nucl. Inst. and Meth. 1985. B8. pp. 255-258.

152

.. 1), .. 2), .. 1), .. 2) 1) , . , 2) , . , , , , ZnS 2B6. , 1020 -3. ZnS , . ZnS(O) ZnO(S) /1/. . , /2/. . () () /3/. , /4/. 1 . 135 . 1. 2. 3. .., .. . .- : , 1987, 200 . urbatov D., Kosyak V., Opanasyuk A. et al // Integrated Ferroelectrics 103, p.32-40 (2009). .., .., .., .. // XV : , 2007 . - . 88-97. .., .., .. . // 2' 2008, . 60-70.

4.

153

.. , .. , .. , .. , . , . 90% , , . /1/. . . - 6,7 , 3 . , . , : , . : . (24H10NO·HCl) . . . , , . . , , , . . 1. .. , .. , .. . . . 2008, .72, 7 . 1054.

154

- .. , .. , .. , .. . , . , , 10% . , , . , . - 3 5,7 . , -7 , 50 , 20, 60 99%. -7 ±2%. 3·1015 -2. He+ c 3 . , SIMNRA. . , 0,1 2,4 , , FeO, Fe2O3 Feo(OH). , , , , 60% .

155

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157

110, .. 1), .. 1), .. 1), .. 1), .. 1), .. 2) 1) , . , 2) . .. , . , , , 110. - . RHEN602 Leco. . 0.05 2500 ppm 0.02 ppm. , . 1 H2SO4+H2O 0,05 /2 . . 24 . , , , . , 15% , . . . 0,00075 %, - 0,0025 %. , , , , , . , , ( , -). . .

158

- 110, .. , .. , .. , .. , .. , .. , .., .. , . , , 110 . () 5020 , 0,8 . . 15 , - 24 . , . , , . . , (15, 20 25 /2). 10 50 /2. 18 , 50 . 30 . ( 107 /) . 5 -7 . , ( -) . . , . , . , , , . , .

159

.. , .. , .. , . , () «» 2 . : , , . . . , . 10-7 . . x, y z 360°. 0 135°. , . (, ), - . . . . . /E=1.5в10-3 (1.5 1 ). , , , . ( ), 10 ppm.

160

DEVELOPMENT OF A TIME-OF-FLIGHT DETECTOR SYSTEM FOR ISOCHRONOUS MASS SPECTROMETRY AT FAIR N. Kuzminchuk1,2, B. Fabian2,3, H. Geissel2,3, R. KnЖbel2,3, C. Kozhuharov2, S. Litvinov3, Y. Litvinov3, Z. Patyk3, W. Plaъ2,3, C. Scheidenberger2,3, B. Sun2,3, H. Weick3 1 Tomsk Polytechnic University, FMSM, Tomsk, Russia; 2II Physikalisches Institut, Justus-Liebig-UniversitДt Gieъen, Germany; 3GSI, Darmstadt, Germany; At the FAIR facility, the projectile fragment separator Super-FRS will provide beams of exotic nuclei with unprecedented intensity. The new Collector Ring (CR) is optimized to accept large-emittance secondary beams provided by the Super-FRS. High-precision mass measurements of exotic nuclei with lifetimes as short as a few tens of microseconds will be performed with Isochronous Mass Spectrometry (IMS) at the CR. For these measurements a dual Time-of-flight (TOF) detector system is under development. In the detectors, ions passing a thin carbon foil release secondary electrons, which are transported in forward and backward directions to microchannel plates by electric and magnetic fields. For even better performance of the TOF detector, a prototype was optimized for efficiency, rate capability /1/ and timing characteristics. Timing characteristics were tested by measuring the coincidence between the backward and forward detectors with a fast sampling digital oscilloscope (40Gs/s). The measurement shows a distribution with deviation of 68 ps. The dispersion in the time-of-flight of the secondary electrons due to their initial velocity spread and their spatial distribution after emission from the foil was investigated. The software for the TOF data analysis was extended to determine the timestamps of online experimental data and offline data acquired with different oscilloscopes and different time discrimination methods. The influence of the MCP dead time on the rate capability of the detectors was examined experimentally and compared to a theoretical model /2/. Currently measured rate at which the linearity between outgoing current and rates of the microchannel secondary electrons starts to deviate is 8 10 6 Hz and breaks at value 3.5 10 7 Hz. Microchannel plates with the half pore size would increases the number of channels and hence improve the rate capability by a factor of four. REFERENCES 1. 2. Fabian B., PhD thesis, Justus-Liebig-UniversitДt Gieъen 2008: Characterization and Optimization of a Time-of-Flight Detector for Isochronous Mass Measurement at the ESR. Fraser G. W. et al. // Nucl. Instrum. Methods A 306, 247, 1991.

161

- . . 1), . . 2), . . 2) , . . 3), . . 3) 1) , . , 2) , . , 3) . . . , . , (), . - /1/. - « - » . 1,5 - . . . , (W) 0,4-1,0 /2. , . W0,6 /2 CrSi2. . 0,3 , 0,7-1,2 . , . - , , . 1. .., .., .., .., .. // , 6, 2008, . 32-36.

162

.. 1), .. 2), .. 1), .. 2), .. 1) 1) , . , 2) , . , (, , ) . Al, Cr, Zr ., . WC-TiC-C () , , . Ti-Cr-N (j) 50 150 /2. 320 . , c j = 100 /2 - WC-TiC-C, Ti-Cr-N. 40 . 150 /2 (Ti,Cr)N, , , . j = 100 /2. , (Ti,Cr)N. Ti-Cr-N - .

163

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, , Laboratoire PHYMAT, Universite de Poitiers, France, 3) , , , 4) , ,
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, . , VI (GFR) [1]. . . (Tix-Zr1-x)N ( 0x1) ~300 (100) . 8x1014 /2 360 . , : , - , . . , Na-Cl , . , : . . 1. Gavarini S., Toulhoat N. and other. Journal of Nuclear Materials.2007. Issue 362. P 364.

164

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f f + v (N , t ) f - C =0, t N N t , N , f ( N , t ) - , v = AS (t ) N 1 / 3 - bN - B - , S (t ) - . b /2/, A B , C . , (1) - /3, §100/. , S 0 = 3 A -1 (bB 2 / 4)1/ 3 , N eq AS 0 / b . (1) .

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1. 2. 3. Cherenda N.N., Uglov V.V., Anishchik V.M., Stalmashonak A.K. et. al. // Surface & Coatings Technology. 2006. V. 200. P. 5334 5342. ., . . - .: , 1978, 280 . .., .. . .: , 2001, 536 .
165

/, - Cr .., .. , , . / (/) . , / (), - , , (). , , . , , - . , - Cr- (), Cr+ . , , 7--1068 Cr-, Cr+ 5, 10 20 . , 0= 2.0 . 1 ~170, ~225 ~310 . , , . , , Cr+ , . Cr/.

166

.. , .. , .. , . , , . , , . . . () . HF:C2H5OH (1:1). 2,8-6 . ~ 50%. «» - (30%+ 70% +) 300 , 60 , 50 /2. , 20 , 1,5 . 10 /2 190 45 . 3 980 460 . . 3 . . , , .
167

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168

- () ..1), ..2), .. 1), ..1) 1) , , 2) «»- .. , , 302. . 50, . 1016 5·1017 -2 40 , 0,1 , 2,06. SIMS. , , . . . , , , : Fe60Cu40 Fe4Cu3. , . , . , /1/, . () , 302 . 250 . , 0,24 ( 1016 -2) 0,35 ( 5·1017 2 ) 0,13 ( 1017 -2). , , . 0,03 20 1017 -2. 1. .. . : -.: « », 2001.-152.

169

. .. 1), .. 2), .. 2), .. 2), .. 2) 1) , . , 2) « . », . , . /1/, . 1 0,5 В 3 A / 2 . 50 15 . , , , , , , . , . , , j=0.5 A/2, 980 /2, =0,194 1180, =0,154 1300, =0,070 1560 /2. . . , , . 1. .., .., .. . // « », 7-12 2008, . ., 2008 .. 333.

170

1612 Ni++ 7 .. , .. , .. - .. , . , - , IV , (). (< 0,4Tm) . /1/. - . , - . 1612 (-823), (380 600)° Ni++ c 7 ~3в1020 6в1020 /2. - , . . , , . - - . ( 08-08-13706-_). 1. .., .. . - .: , 2002, . 300.

171

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173

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174

.. .. .. .. .. .. .. .. .. .. .. .. .. .. .. . .. .. .. . .. .. .. .. . . .. .. .. .. .. .. .. .. .. .. .. .. ..

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.. .. .. .. .. . . .. .. .. .. .. .. .. . .. .. .. .. .. .. .. .. .. . . .. .. .. .. .. .. .. .. .. .. .. . . .. .. ..

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176

.. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. . .. .. .. . . .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. ..

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177

.. .. .. .. . .. .. .. .. .. .. .. .. .. . .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. ..

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178

.. .. .. .. .. .. .. .. .. .. .. .. .. .. . . . . .. .. .. .. .. .. .. .. .. .. .. .. .. . . .. . .. .. .. .. .. ..

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179

.. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. . .. .. .. .. .. .. .. .. .. .. .. .. - .. .. . .

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181

.. .. . . .. .. .. .. .. .. .. . .. C.. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. . .. .. .. .. .. .. ..

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182

Abadias G. Fabian B. Geissel H. Ikeda T. KnЖbel R. Kozhuharov C. Kuzminchuk N. Litvinov S. Litvinov Y. Patyk Z. Plaъ W. Scheidenberger C. Sun B. Weick H. Yamazaki Y.

A 164 F 161 G 161 I 20 K 161 161 161 L 161 161 P 161 161 S 161 161 W 161 Y 20

183

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184