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SCANNING TUNNELING MICROSCOPE AS A MEASURING INSTRUMENT OF NANOELECTRONICS
S. A. Bychihin, M. O. Gallyamov, V. V. Potemkin, A. V. Stepanov, I. V. Yaminsky
The obtained images of different surfaces with atomic and molecular spatial resolution prove that scanning tunneling microscope (STM) has advantages for precise measurements in nanotechnological applications. The result of noise measurements with usage of STM are described and it is shown that the main restriction on the normal spatial resolution of STM is due to low frequency fluctuations of tunnel current. The limit sensibility for STM was determined.
Измерительная техника (1998), ?4, сс. 58-61.