ARTICLE IN PRESS N IM B Beam Interactions with Materials & Atoms Nuclear Instruments and Methods in Physics Research B xxx (2005) xxxxxx www.elsevier.com/locate/nimb Gas cluster ion beam infusion processing of semiconductors R. MacCrimmon *, J. Hautala, M. Gwinn, S. Sherman Epion Corporation, 37 Manning Road, Billerica, MA 01821, United States Available online Abstract The application of gas cluster ion beam (GCIB) infusion in advanced IC fabrication is described. ... B xxx (2005) xxxxxx Fig. ...
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