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with Materials Atoms Nuclear Instruments and Methods in Physics Research B xxx (2005) xxxxxx www.elsevier.com/locate/nimb ITO surface smoothing with argon cluster ion beam C. Heck a a,* , T. Seki b, T. Oosawa c, M. Chikamatsu c, N. Tanigaki a, T. Hiraga a, J. Matsuo b c Laboratory of Purified ... Results show that relatively low-energy (10 keV) clusters with mean size of 2000 Ar atoms are sufficient to reduce the mean roughness of the ITO surface to about one fourth of its initial value. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb_Ar_clasterionbeam.pdf -- 99.7 Кб -- 07.10.2005 Похожие документы
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