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ARTICLE IN PRESS Nuclear Instruments and Methods in Physics Research B xxx (2005) xxx-xxx www.elsevier.com/locate/nimb Analysis of charge, mass and energy of large gas cluster ions and applications for surface processing D.R. Swenson Available online * Epion Corporation, 37 Manning Road, Billerica, MA 01821, United States Abstract In a previous study averages of +3.2charges, 64 keV energy and 10,400 atoms were measured for a high intensity Ar gas cluster ion beam [D.R. Swenson, Nucl. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb_GCIB_processing_Swenson.pdf -- 258.1 Кб -- 07.10.2005 Похожие документы
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Ссылки http://www.chronos.msu.ru/old/EREPORTS/koehler_understanding.pdf -- 77.8 Кб -- 14.12.2013
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Ссылки http://chronos.msu.ru/old/EREPORTS/koehler_understanding.pdf -- 77.8 Кб -- 14.12.2013 Похожие документы