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241. Статьи, подготовленные для публикации в журнале Nuclear Instruments and Methods
... Collaborative Research Center for Cluster Ion Beam Process Technology . ...
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Ссылки http://danp.sinp.msu.ru/Articles_GCIB_NIMB.htm -- 33.9 Кб -- 09.10.2005
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242. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_861_clasterionsize_Yamada.pdf
Nuclear Instruments and Methods in Physics Research B 206 (2003) 861ґ865 www.elsevier.com/locate/nimb Cluster species and cluster size dependence of damage formation by cluster ion impact Takaaki Aoki b a,b,* , Jiro Matsuo a, Gikan Takaoka a, Isao Yamada b,c a Ion Beam Engineering Experimental Laboratory, Kyoto University ... A larger number of displacements was found with the Xe cluster than Ne and Ar clusters of the same cluster size because the Xe cluster had a larger mass and momentum. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_861_clasterionsize_Yamada.pdf -- 325.0 Кб -- 09.10.2005
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243. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_846_craterformation_Clasterion_Yamada.pdf
Nuclear Instruments and Methods in Physics Research B 206 (2003) 846-850 www.elsevier.com/locate/nimb Crater formation and sputtering by cluster impacts Z. Insepov a c a,* , L.P. Allen b, C. Santeufemio b, K.S. Jones c, I. Yamada a,d LASTI, Himeji Institute of Technology, 3-1-2 Kouto, Kamigori ... Fig. 1 shows a side-view for the simulated crater formed by a 25 eV/atom Ar135 cluster impact on a Si (1 0 0) surface after the time intervals of 14.3 ps. ... Four atomic layers from the Fig. ... Fig. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_846_craterformation_Clasterion_Yamada.pdf -- 446.2 Кб -- 09.10.2005
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244. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_902_Yamada_largeClasterIonCurrent.pdf
Nuclear Instruments and Methods in Physics Research B 206 (2003) 902ґ906 www.elsevier.com/locate/nimb Generation of the large current cluster ion beam T. Seki a c a,b,* , J. Matsuo a, G.H. Takaoka a, I. Yamada b,c Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606-8501, Japan b Collaborative Research Center for Cluster Ion ... The intensity of neutral cluster beam increased with source gas pressure. ... The beam current increased with source gas pressure. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_902_Yamada_largeClasterIonCurrent.pdf -- 258.3 Кб -- 07.10.2005
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245. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_875_Yamada_opticalFilms_o2Clasters.pdf
Nuclear Instruments and Methods in Physics Research B 206 (2003) 875ґ879 www.elsevier.com/locate/nimb Stable optical thin film deposition with O2 cluster ion beam assisted deposition N. Toyoda *, Y. Fujiwara, I. Yamada Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology, 3-1-2 Kouto, Kamigori, Hyogo 678-1205, Japan Abstract O2 gas cluster ion beam (O2 -GCIB) assisted depositions were studied to deposit high-quality Ta2 O5 ,Nb2 O5 and SiO2 films. ... Fig. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_875_Yamada_opticalFilms_o2Clasters.pdf -- 187.4 Кб -- 07.10.2005
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246. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_866_Yamada_GCIBFilmFormation.pdf
Nuclear Instruments and Methods in Physics Research B 206 (2003) 866ґ869 www.elsevier.com/locate/nimb Titanium-dioxide film formation using gas cluster ion beam assisted deposition technique O. Nakatsu a c a,b,* , J. Matsuo b, K. Omoto b, T. Seki b, G. Takaoka b, I. Yamada c Semiconductor Equipment Division, Shimadzu Corporation, 380-1, Horiyamashita, Hadano-city, Kanagawa 259-1304, Japan b Ion ... The films were formed at 3, 5, 7 and 9 kV of acceleration voltages. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_866_Yamada_GCIBFilmFormation.pdf -- 110.7 Кб -- 07.10.2005
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247. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_870_Yamada_GCIB_Roughness.pdf
Nuclear Instruments and Methods in Physics Research B 206 (2003) 870ґ874 www.elsevier.com/locate/nimb Reduction of surface roughness by Ta2O5 film formation with O2 cluster ion assisted deposition Y. Fujiwara a a,b,* , N. Toyoda a, K. Mochiji b, T. Mitamura b, I. Yamada a Laboratory of Advanced Science and Technology for Industry ... Dependence of average roughness and peak-to-valley of Ta2 O5 film on thickness of O2 cluster ion assisted deposition. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_870_Yamada_GCIB_Roughness.pdf -- 157.3 Кб -- 07.10.2005
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248. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_855_Yamada_B-ClasterIons.pdf
... Experiments and computer simulations of low-energy boron monomers and decaborane clusters implantation were performed. Molecular dynamics simulations of B10 cluster implantation have shown similar implant depth but different damage density and damage structure compared to monomer (B1 ) ion implantation with the same energy-per-atom. ... Therefore, the depth profile of B atoms by cluster implantation was the same as that by B monomer ions at the same energy per atom. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_855_Yamada_B-ClasterIons.pdf -- 157.7 Кб -- 07.10.2005
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249. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_838_Yamada_GCIB_CollisionsSolid.pdf
Nuclear Instruments and Methods in Physics Research B 206 (2003) 838ґ841 www.elsevier.com/locate/nimb Atomistic study of cluster collision on solid surfaces Jiro Matsuo a a,* , Toshio Seki a,b , Takaaki Aoki a,b , Isao Yamada b,c Ion Beam Engineering Experimental Laboratory, Kyoto University, Ysoshida-Honmachi, Sakyo, Kyoto 606-8501, Japan b Collaborative Research Center for Cluster ... The depth of damage region in the target became shallower with decrease of the impact energy. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_838_Yamada_GCIB_CollisionsSolid.pdf -- 199.3 Кб -- 07.10.2005
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250. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_842_Yamada_GCIB_modellingSmoothing.pdf
Nuclear Instruments and Methods in Physics Research B 206 (2003) 842ґ845 www.elsevier.com/locate/nimb Modeling of surface smoothing process by cluster ion beam irradiation A. Nakai c a,* , a T. Aoki a,b , T. Seki a,b , J. Matsuo a, G.H. Takaoka a, I. Yamada b,c Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606-8501, Japan b Collaborative Research Center for Cluster Ion ... Smoothing rate depends on the wave number as well as the ion dose. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_842_Yamada_GCIB_modellingSmoothing.pdf -- 157.1 Кб -- 07.10.2005
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251. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_820_Yamada_GCIB_Technology.pdf
Nuclear Instruments and Methods in Physics Research B 206 (2003) 820ґ829 www.elsevier.com/locate/nimb Cluster ion beam process technology Isao Yamada a a,* , Jiro Matsuo b, Noriaki Toyoda a, Collaborative Research Center for Cluster Ion Beam Process Technology Laboratory of Advanced Science and Technology , Himeji Institute of Technology , 3-1-2 Kouto, Kamigori, Ako, Hyogo 678-1205, Japan b Ion ... Cluster ion beam currents of several hundred microamperes have been demonstrated. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_820_Yamada_GCIB_Technology.pdf -- 510.5 Кб -- 07.10.2005
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252. http://danp.sinp.msu.ru/Articles_GSIB/nimb206_830_GCIB_Applications_Equipment.pdf
Nuclear Instruments and Methods in Physics Research B 206 (2003) 830ґ837 www.elsevier.com/locate/nimb Gas cluster ion beam applications and equipment Allen Kirkpatrick * Epion Corporation, 37 Manning Road, Billerica, MA 01821, USA Abstract Interactions of gas cluster ions with solid surfaces, and prospective applications for those interactions, have been research topics of interest for several years. ... Cluster ion surface interactions Fig. 3 shows a simple representation of cluster impact. ... Fig. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb206_830_GCIB_Applications_Equipment.pdf -- 535.9 Кб -- 07.10.2005
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253. http://danp.sinp.msu.ru/Articles_GSIB/nimb236_249_VirusInactivation_IonBeams.pdf
... In this work, particle (a, d and п) and c irradiations were used for partial and total inactivation of Foot and Mouth Disease Virus (FMDV), Rauscher Leukemia Virus (RLV) and Herpes Simplex Virus (HSV). Obtention of the D37 dose from survival curves and the application of the target theory, permitted the determination of molecular weight of the nucleic acid genomes, EBR values and useful information for vaccine preparation. ... the HSV virus. ... RLV(c), is the dose-inactivation ? ... Virus Res. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb236_249_VirusInactivation_IonBeams.pdf -- 167.9 Кб -- 07.10.2005
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254. http://danp.sinp.msu.ru/Articles_GSIB/nimb237_455_1maclasterionSource.pdf
... The intensity of neutral beams generated from various shapes of nozzles was measured and the orifice diameter of skimmer was adjusted. ... The ratio of monomer ion in the beam was 58%. ... Results and discussion Fig. 2 shows the skimmer diameter dependence of neutral beam intensity from the metal nozzles B and C. The source gas was Ar. ... Conclusion In order to get high intensity of neutral cluster beam, new metal nozzles were constructed and orifice diameter of skimmer was adjusted to beam...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb237_455_1maclasterionSource.pdf -- 163.3 Кб -- 07.10.2005
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255. http://danp.sinp.msu.ru/Articles_GSIB/nimb237_240_Liquidsource_ClasterIons.pdf
Nuclear Instruments and Methods in Physics Research B 237 (2005) 240ґ244 www.elsevier.com/locate/nimb Development of polyatomic ion beam system using liquid organic materials G.H. Takaoka *, Y. Nishida, T. Yamamoto, M. Kawashita Ion Beam Engineering Experimental Laboratory, Kyoto University, Nishikyo, Kyoto 615-8510, Japan Available online 20 June 2005 Abstract We have developed a new type of polyatomic ion ... Fig. 3 shows the mass spectra of (a) octane and (b) ethanol ion beams. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb237_240_Liquidsource_ClasterIons.pdf -- 198.5 Кб -- 07.10.2005
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256. http://danp.sinp.msu.ru/Articles_GSIB/nimb237_235_reviewGCIB_SConductors.pdf
Nuclear Instruments and Methods in Physics Research B 237 (2005) 235ґ239 www.elsevier.com/locate/nimb Gas cluster ion beams for wafer processing M.E. Mack * Epion Corporation, 37 Manning Road, Billerica, MA 01821, USA Available online 28 June 2005 Abstract Gas cluster ion beams (GCIB) represent a powerful new tool for wafer processing. ... Introduction Gas cluster ion beams (GCIB) have been demonstrated to be valuable for surface smoothing and etching [1]. ... Fig. ... This ionizer is shown in Fig. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb237_235_reviewGCIB_SConductors.pdf -- 283.0 Кб -- 07.10.2005
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257. http://danp.sinp.msu.ru/Articles_GSIB/nimb_GCIBSystem_Yamada.pdf
ARTICLE IN PRESS Nuclear Instruments and Methods in Physics Research B xxx (2005) xxx ґ xxx www.elsevier.com/locate/nimb Development of a size -selected gas cluster ion beam system for low-damage processing Noriaki Toyoda *, Shingo Houzumi, Isao Yamada Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Hyogo 678-1205, Japan Available online Abstract A high-current gaseous cluster ion ... MD simulations also indicated that Ar Fig. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb_GCIBSystem_Yamada.pdf -- 211.3 Кб -- 07.10.2005
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258. http://danp.sinp.msu.ru/Articles_GSIB/nimb_GCIB_energydistribution.pdf
... Energy distributions of the cluster ion beams show that both size and energy of cluster ion decrease by numerous collisions with residual gas. ... In this paper, in order to investigate the influence of the collisions with residual gas on cluster beams, the dependence of the cluster ion energy on chamber pressure was studied. ... Chamber pressure dependence of peak energy and collision frequency between cluster ion and residual gas. ... Model of energy loss in a collision with residual gas. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb_GCIB_energydistribution.pdf -- 190.9 Кб -- 07.10.2005
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259. http://danp.sinp.msu.ru/Articles_GSIB/njmb_review_GCIB_methodand%20equipments.pdf
Instruments and Methods in Physics Research B xxx (2005) xxxґxxx www.elsevier.com/locate/nimb Recent advances in R D of gas cluster ion beam processes and equipment Isao Yamada *, Noriaki Toyoda Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Hyogo 678-1205, Japan Available online Abstract This report reviews a new field of ion beam ... General GCIB apparatus schematic. ... NEDO/METI Project on Gas Cluster Ion Beam Process Technology. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/njmb_review_GCIB_methodand%20equipments.pdf -- 284.4 Кб -- 07.10.2005
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260. http://danp.sinp.msu.ru/Articles_GSIB/nimb_B_smallclustersions.pdf
ARTICLE IN PRESS Nuclear Instruments and Methods in Physics Research B xxx (2005) xxxґxxx www.elsevier.com/locate/nimb Small B-cluster ions induced damage in silicon Jiarui Liu *, Xuemai Wang, Shao Lin, Hui Chen, Wei-Kan Chu Department of Physics, and TcSAM, University of Houston, TX 77204-5932, United States Available online Abstract Small molecule-cluster ions, such as BF2, BSi, BGe, B10H14 and Bn can be used for shallow junction formation. ... Fig. 1(a) shows the Cn-cluster ion beam current Fig. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb_B_smallclustersions.pdf -- 134.3 Кб -- 07.10.2005
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